Safety and Compliance

The production of high purity chlorosilane for polysilicon requires many steps which are potentially hazardous. From initial handling of raw materials such as Chlorine or Hydrogen Chloride, production of Trichlorosilane, TCS deposition using Hydrogen gas and there are many safety issues to consider. While potential hazards exist, the process is done safely and efficiently with a respectful understanding of this potential and by following proper procedures. The DEI Plant design incorporates safety features in its equipment and design.

Our Design and Procedures include steps to minimize inherent risks associated with chlorination and purification processes. This includes steps for:

• Instrumentation and controls
• Hazard and operability analysis
• Inherent safety in process and equipment design
• A pre-startup safety review